The instrument consists of DC high voltage power supply, vacuum system, air supply system, glow-discharge lamp, vacuum coating bell, and etc.
Configuration and technical parameters
☆Vacuum coefficient: rotary-vane vacuum pump, single phase 220V, pumping speed 4L/s, ultimate vacuum: 6×10^-1Pa.
☆I(lǐng)ngelligent digital thermocouple gauge measuring system.
☆DC high voltage power supply: 0~2000V continuously adjustable; discharge current: 0~0.5A;
☆Working air pressure: 10~200Pa adjustable, discharge pipe: Φ40×400mm.

The product is developed by Zhejiang University